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Bayard-Alpert ionization gauge using carbon-nanotube cold cathode

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4 Author(s)
Huang, J.X. ; State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen (Zhongshan) University, Guangzhou 510275, People’s Republic of China and Guangdong Provincial Key Laboratory of Display Materials and Technologies, Sun Yat-sen (Zhongshan) University, Guangzhou 510275, People’s Republic of China ; Jun Chen ; Deng, S.Z. ; Xu, N.S.

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A cold-cathode Bayard-Alpert (BA) ionization gauge based on a carbon-nanotube (CNT) cold cathode has been fabricated. The linear CNT cathode was prepared by growing CNTs on a stainless-steel rod using thermal chemical vapor deposition. The gauge was tested at different pressure ranges and good linearity between the collected ion current and pressure was obtained. The sensitivity of the ionization gauge was tested and was about 3.6 Torr-1 when the pressure ranged from 3×10-5 to 3×10-6 Torr. The methods for further improving the performance of the cold-cathode ionization gauge are discussed.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:25 ,  Issue: 2 )

Date of Publication:

Mar 2007

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