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Measuring hydrogen-carbon gas inside high-vacuum glass panels by the comparative infrared light method

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5 Author(s)
Chen, Yi-Hsien ; Graduate Institute of Electro-Optical Engineering, National Taiwan University, 1 Roosevelt Road, Sec. 4, Taipei, 106 Taiwan, Republic of China and Department of Electrical Engineering, National Taiwan University, 1 Roosevelt Road, Sec. 4, Taipei, 106 Taiwan, Republic of China ; Chien, Yu-Han ; Fu, Chuan-Hsu ; Lin, Wee-Yee
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In this article, the authors propose a comparative infrared light method for detecting the hydrogen-carbon (HC) gas inside sealed high-vacuum glass panels. Unlike traditional infrared detection, a comparative infrared light method can distinguish gas species at a relatively short distance, which makes it suitable for carbon-nanotube field-emission display applications. In principle, the comparative infrared light method makes use of a high-vacuum reference panel to determine the existence of the target gas inside a sample panel under test. The authors experimentally demonstrated that residual organic gas (HC related) existed in a 5 mm gap between two glass panels at the vacuum level of 10-6 torr by this method.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:25 ,  Issue: 2 )