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1 A/cm2 current density from microgated carbon nanotube field-emitter arrays grown by dc plasma chemical-vapor deposition

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2 Author(s)
Hsu, David S.Y. ; Code 6174 Chemistry Division, Naval Research Laboratory, Washington, DC 20375-5320 ; Shaw, J.L.

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We report improved emission performance of microgated carbon nanotube field-emitter arrays. The arrays with 0.1 mm2 areas produced anode currents in excess of 1 mA (1 A/cm2) and transconductance of up to 174 μS (174 mS/cm2) at gate voltages of 75 V or less. The carbon nanotubes were grown by dc plasma chemical-vapor deposition, but were not oriented vertically during inspection in the scanning electron microscope. Most of the nanotubes had diameters near 10 nm. We suggest that the small tube diameter caused the relatively high emission current and also produced limber tubes, unable to support themselves vertically.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 2 )

Date of Publication:

Mar 2006

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