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High density plasma chemical vapor deposition gap-fill mechanisms

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2 Author(s)
Mungekar, Hemant P. ; Dielectric Gap-Fill Division, Dielectric Systems and Modules PBG, Applied Materials, Santa Clara, California 95054 ; Lee, Young S.

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Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 2 )