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Ni-carbon nanotubes nanocomposite for robust microelectromechanical systems fabrication

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4 Author(s)
Tsai, Li-Nuan ; Microsystems Integration Laboratory, Department of Electronics Engineering, Department of Mechanical Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan, 300, Republic of China ; Cheng, Yu-Ting ; Hsu, W. ; Weileun Fang

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.2161222 

This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10–20 nm, inner diameter: 5–10 nm, length: 0.5–200 μm) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 g/L) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 μm. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472–476)). In addition, the E/ρ ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 1 )