By Topic

Ni-carbon nanotubes nanocomposite for robust microelectromechanical systems fabrication

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Tsai, Li-Nuan ; Microsystems Integration Laboratory, Department of Electronics Engineering, Department of Mechanical Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan, 300, Republic of China ; Cheng, Yu-Ting ; Hsu, W. ; Weileun Fang

Your organization might have access to this article on the publisher's site. To check, click on this link: 

This article presents a novel fabrication process to enhance the operational performance and reliability of electrothermal microactuators. Carbon nanotubes (CNTs) (outer diameter: 10–20 nm, inner diameter: 5–10 nm, length: 0.5–200 μm) are incorporated in an electrolytic nickel deposition process in which a well-dispersed Ni-CNTs colloidal solution is made by a special acid oxidative method to synthesis a Ni-CNTs nanocomposite for device fabrication. Measurement results show that the microactuator plated with CNTs (0.028 g/L) needs the power requirement less 95% than the pure nickel device at the same output displacement of 3 μm. The performance improvement of the electrothermal microactuator made of the nanocomposite, including device strength and power efficiency, has shown to be similar to the Ni-diamond composites (L. N. Tsai, G. R. Shen, Y. T. Cheng, and W. S. Hsu, The 54th Electronic Components and Technology Conference, June 2004, pp. 472–476)). In addition, the E/ρ ratio of the Ni-CNTs composite can be enhanced to 1.47 times higher than that of pure nickel, which is a fascinating result for resonant device fabrication.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 1 )