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Synthesis and characterization of self-catalyzed CuO nanorods on Cu/TaN/Si assembly using vacuum-arc Cu deposition and vapor-solid reaction

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5 Author(s)
Chen, U.S. ; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan, Republic of China ; Chueh, Y.L. ; Lai, S.H. ; Chou, L.J.
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Large-area arrays of copper oxide (CuO) nanorods were self-catalyzed and selectively grown on a Cu/TaN/Si assembly by combining vacuum-arc Cu deposition and vapor-solid reaction. X-ray-diffraction spectra showed the peaks of Cu films and CuO nanorods, respectively. Field-emission scanning electron microscopy images showed semialigned CuO nanorods with diameters of ∼40–80 nm. High-resolution transmission electron microscopy images showed the structure of individual CuO nanorods and their [111] growth direction. Auger electron spectroscopy depth profiles showed the elemental distribution of the CuO/a-TaN/Si assembly. X-ray photoelectron spectrometry identified the chemical nature of the CuO nanorods. Their electron field-emission properties are discussed from the current-density–voltage curves and Fowler-Nordheim plots.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:24 ,  Issue: 1 )