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50×50 μm pixel magnetic focus field emitter array image sensor with high-gain avalanche rushing amorphous photoconductor target

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10 Author(s)
Egami, N. ; Science and Technical Research Laboratories, NHK, 1-10-11 Kinuta, Setagaya-ku, Tokyo 157-8510, Japan ; Nanba, M. ; Takiguchi, Y. ; Miyakawa, K.
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A 50×50 μm pixel field emitter array image sensor with a highly sensitive avalanche-mode photoconductive target and a scanning electron focusing system consisting of permanent magnets were fabricated and tested as a step toward the development of ultrahigh-sensitivity compact image sensors for high-definition television cameras. The experimental results revealed that the magnetic focusing conditions of the prototype sensor were in accordance with those estimated from the simulation, and the prototype sensor could obtain both enough resolution for its pixel size and high sensitivity by focusing the electrons emitted from the field emitter array onto the highly sensitive photoconductive target.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:23 ,  Issue: 5 )

Date of Publication:

Sep 2005

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