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Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition

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10 Author(s)
Kometani, R. ; University of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan and CREST JST, Japan Science and Technology Co., Kawaguchi Center Building, 4-1-8, Hon-cho, Kawaguchi, Saitama 332-0012, Japan ; Hoshino, T. ; Kondo, K. ; Kanda, Kazuhiro
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An electrostatic 3D nanomanipulator that can perform inclusion of nano parts and cell operation has been developed by focused-ion-beam chemical vapor deposition (FIB-CVD). This 3D nanomanipulator has 4 fingers in order to catch the target of various shapes firmly. The movable principle is that an electric charge is accumulated in the structure by applying voltage to 4 fingers structure and it moves by repulsion of the electric charge. Furthermore, we succeeded to catch the microsphere (polystyrene latex with a diameter of 1 μm) by using this 3D nanomanipulator with 4 fingers.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:23 ,  Issue: 1 )

Date of Publication:

Jan 2005

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