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Lithographic tuning of photonic-crystal unit-cell resonators with InGaAs/GaAs quantum dots emitting at 1.2 μm

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9 Author(s)
Choi, Y.-S. ; Department of Physics, Korea Advanced Institute of Science and Technology, Taejon 305-701, Korea ; Kim, S.-K. ; Kim, S.-H. ; Park, H.-G.
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Modified photonic crystal unit-cell resonators containing self-organized In0.65Ga0.35As/GaAs quantum dots are fabricated and characterized. Especially, the tunability of the resonant frequencies as a function of the nearest air holes, the outer air hole, and the lattice constants are investigated in detail by comparing experimental data with three-dimensional finite-difference time-domain calculations. The experimental Q is found to be more than 2000 for a monopole mode and a quadrupole mode.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:23 ,  Issue: 1 )