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Fabrication and properties of ultranano, nano, and microcrystalline diamond membranes and sheets

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6 Author(s)
Reinhard, D.K. ; Department of Electrical and Computer Engineering, 2120 EB and Fraunhofer Center for Coating and Laser Applications, B100, RCE, Michigan State University, East Lansing, Michigan 48824 ; Grotjohn, T.A. ; Becker, M. ; Yaran, M.K.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1819928 

Thin diamond membranes and free-standing sheets are of interest for a variety of potential applications. This article describes the film nucleation, microwave plasma-assisted chemical-vapor-deposition synthesis, and subsequent processing steps required to make free-standing strong and flexible diamond foils of several cm2. Films are initially deposited on silicon wafers as ultrananocyrstalline, nanocrystalline, or microcrystalline diamond by varying selected deposition parameters including gas composition, nucleation, power, substrate temperature, and pressure. Subsequently the diamond is separated from the original substrate and applied either to new substrates or to frames. Diamond membranes and sheets with thickness between 1 and 3 μm have been fabricated from each of these film types. The sheets are drapable and can be applied to curved surfaces and wrapped around cylinders. Properties of the films including optical transmission, Young’s modulus and fracture strength are described. Several examples of foils and associated frames and substrates are given.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:22 ,  Issue: 6 )

Date of Publication:

Nov 2004

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