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Accuracy of scanning capacitance microscopy for the delineation of electrical junctions

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3 Author(s)
Stangoni, M. ; Swiss Federal Institute of Technology (ETH), CH-8092 Zurich, Switzerland ; Ciappa, M. ; Fichtner, Wolfgang

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1642646 

In this work, we investigate the theoretical and the experimental accuracy limits of the delineation of pn junctions by scanning capacitance microscopy. We compare three different techniques basing both on experimental data and on one- and two-dimensional simulations of scanning capacitance measurements of epitaxial and shallow junctions. © 2004 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:22 ,  Issue: 1 )

Date of Publication:

Jan 2004

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