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Precision microcomb design and fabrication for x-ray optics assembly

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5 Author(s)
Sun, Yanxia ; Space Nanotechnology Laboratory, Center for Space Research, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 ; Heilmann, Ralf K. ; Chen, Carl G. ; Forest, Craig R.
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Silicon microcombs developed at our laboratory for the precision alignment and assembly of large-area foil optics have previously been demonstrated to achieve submicron-level assembly repeatability with submillimeter-thick flat substrates. In this article we report on a double-side deep reactive-ion etch fabrication process using silicon-on-insulator wafers which was developed to improve the microcombs’ manufacturing accuracy. © 2003 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 6 )