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Fabrication of triode field emitter with planar carbon-nanoparticle cathode

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4 Author(s)
Park, Kyung Ho ; Department of Molecular Science and TechnologyInformation Display Research Institute, Ajou University, Suwon 442-749, Korea ; Seo, Woo Jong ; Lee, Soonil ; Koh, Ken Ha

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Triode field emitters with planar-carbon-nanopaticle (CNP) cathodes were successfully fabricated using the conventional photolithography and the hot-filament chemical vapor deposition. Micro-Raman spectroscopy revealed that CNP cathodes, which had been deposited through tiny gate holes, consisted of good-quality graphitic carbons. Electron emission from a CNP triode emitter with a 12-μm-diam gate hole started at the gate voltage of 45 V, and the anode current reached the level of ∼120 nA at the gate voltage of 60 V, respectively. For the quantitative analysis of the Fowler–Nordheim (FN) type emission from a CNP triode emitter, we carried out two-dimensional numerical calculation of electrostatic potential using the finite element method. As it turned out, a radial variation of electric field was very important to account for the emission from a planar emitting layer. By assuming the graphitic work function of 5 eV for CNPs, we were able to extract a consistent set of FN parameters, together with the radial position of emitting sites. © 2003 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 4 )

Date of Publication:

Jul 2003

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