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Optimization of Pt tip field emitter array fabricated using focused ion and electron beams

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6 Author(s)
Jarupoonphol, W. ; Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan ; Murakami, K. ; Sakata, K. ; Takai, M.
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Au-gated Pt field emitter arrays were fabricated using focused ion and electron beams in a Au/SiO2/Si layer. Pt emitters with different heights were studied to optimize the emission current. The emitter height should be adjusted to the top-surface level of the gate electrode for optimization of emission behavior. An emission angle of about 5°–10° was obtained. A prototype of a single-emitter electron source was also fabricated using electron-beam induced metal and insulator depositions. © 2003 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 4 )