Au-gated Pt field emitter arrays were fabricated using focused ion and electron beams in a Au/SiO2/Si layer. Pt emitters with different heights were studied to optimize the emission current. The emitter height should be adjusted to the top-surface level of the gate electrode for optimization of emission behavior. An emission angle of about 5°–10° was obtained. A prototype of a single-emitter electron source was also fabricated using electron-beam induced metal and insulator depositions. © 2003 American Vacuum Society.