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Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

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5 Author(s)
Lin, Heh-Nan ; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan ; Sy-Hann Chen ; Ho, Shu-Te ; Chen, Ping-Ren
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We report comparative measurements of the piezoelectric coefficient d33 of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the d33 can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified. © 2003 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 2 )

Date of Publication:

Mar 2003

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