Cart (Loading....) | Create Account
Close category search window
 

Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lin, Heh-Nan ; Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan ; Sy-Hann Chen ; Ho, Shu-Te ; Chen, Ping-Ren
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1562644 

We report comparative measurements of the piezoelectric coefficient d33 of a lead zirconate titanate (PZT) film by piezoresponse force microscopy based on tip/PZT/electrode and tip/electrode/PZT/electrode configurations. With the use of electrically characterized Au-coated tips, the obtained values are in good agreement and indicate a negligible methodological effect. It is concluded that the d33 can be reasonably determined without the use of a top electrode as long as the electrical quality of the tip is qualified. © 2003 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 2 )

Date of Publication:

Mar 2003

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.