By Topic

Crystallization and pyroelectric effect of semiconducting YBaCuO thin films deposited at different temperatures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Yildiz, Ali ; Department of Electrical Engineering, Southern Methodist University, P.O. Box 750338, Dallas, Texas 75275-0338 ; Butler, D.P. ; Celik-Butler, Z. ; Choong-Un Kim

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1562638 

The pyroelectricity and crystallization level of yttrium barium copper oxide (YBa2Cu3O6+x) thin films have been investigated by depositing the thin films by rf magnetron sputtering at different substrate temperatures. A portion of the thin film samples were analyzed by x-ray diffraction (XRD) to investigate the crystallinity while the remainder were processed to fabricate capacitor structures with Au electrodes to study the pyroelectric properties of the thin films. We observed different crystallization levels for samples that were deposited at different substrate temperatures. Pyroelectric behavior was observed to be correlated to the strength of the XRD peaks observed. Samples that lack crystallinity did not display pyroelectric behavior, while samples with observable crystallinity displayed pyroelectric behavior, either as deposited without poling or induced by poling. Samples lacking crystallinity could not be poled to display a measurable pyroelectric behavior. Pyroelectric coefficients on the order of 50 nC/K cm2 were observed in the polycrystalline samples. © 2003 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 2 )