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A field emission vacuum switch using vertically aligned carbon nanotubes grown by a direct current plasma enhanced chemical vapor deposition is reported. Cathodes with optimized field emission properties were evaluated in diode configuration as a test vehicle for the construction of a vacuum power three terminal triode device. Limiting factors such as space charge effects involved with high current densities (more than
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:21
,
Issue:
1
)
Date of Publication: Jan 2003