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Field emission vacuum power switch using vertically aligned carbon nanotubes

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4 Author(s)
Rupesinghe, N.L. ; Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ, United Kingdom ; Chhowalla, M. ; Teo, K.B.K. ; Amaratunga, G.A.J.

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A field emission vacuum switch using vertically aligned carbon nanotubes grown by a direct current plasma enhanced chemical vapor deposition is reported. Cathodes with optimized field emission properties were evaluated in diode configuration as a test vehicle for the construction of a vacuum power three terminal triode device. Limiting factors such as space charge effects involved with high current densities (more than 10 mA/cm2) are also investigated using computer simulations. © 2003 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:21 ,  Issue: 1 )