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We report a method to fabricate tubular nanostructures using vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition as templates. The resulting nanopipes are oriented perpendicular to the substrate and have internal diameters ranging from 30 to 200 nm and can be up to several micrometers in length. These nanopipes can be deterministically positioned on a substrate and arranged into singular devices or arrays. © 2002 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:20 , Issue: 6 )
Date of Publication: Nov 2002