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We describe a method for fabricating narrow, flexible, polymeric fluid conduction tubes with dimensions down to the 100 nm regime. Vapor deposited Parylene tubes of various dimensions were integrated into silicon substrates forming a microfluidic network. In one approach we replicated fluidic systems in polymer by detaching free-standing flexible Parylene tubes from the silicon mold. We demonstrated capillary flow and electrophoretic drive of ions through polymer tubes of up to 5 cm in length. © 2002 American Vacuum Society.