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Fabrication of flexible polymer tubes for micro and nanofluidic applications

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5 Author(s)
Ilic, B. ; Cornell Nanofabrication Facility, School of Applied and Engineering Physics and Nanobiotechnology Center, Cornell University, 212 Clark Hall, Ithaca, New York 14853 ; Czaplewski, D. ; Zalalutdinov, M. ; Schmidt, B.
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We describe a method for fabricating narrow, flexible, polymeric fluid conduction tubes with dimensions down to the 100 nm regime. Vapor deposited Parylene tubes of various dimensions were integrated into silicon substrates forming a microfluidic network. In one approach we replicated fluidic systems in polymer by detaching free-standing flexible Parylene tubes from the silicon mold. We demonstrated capillary flow and electrophoretic drive of ions through polymer tubes of up to 5 cm in length. © 2002 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:20 ,  Issue: 6 )

Date of Publication:

Nov 2002

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