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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:19 Issue:6 Help

Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

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6 Author(s)
Fujita, J. ; NEC Fundamental Research Laboratories, 34 Miyukigaoka, Tsukuba 305-8501, Japan ; Ishida, M. ; Sakamoto, T. ; Ochiai, Y.
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Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1417545 

The Young’s modulus of diamond-like carbon (DLC) pillars was measured by means of mechanical vibration using scanning electron microscopy. The DLC pillars were grown using Ga+ focused ion beam-induced chemical vapor deposition with a precursor of phenanthrene vapor. The Young’s modulus of the DLC pillars was around 100 GPa at vapor pressure of 5×10-5 Pa and it had a quality (Q) value of resonance exceeding 1200. There seemed to be a balance between the DLC growth rate and surface bombardment by the ions, and this played an important role in the stiffness of the pillars. Some of the DLC pillars showed a very large Young’s modulus over 600 GPa at low gas pressure conditions. © 2001 American Vacuum Society.

Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:19 ,  Issue: 6 )

Date of Publication: Nov 2001

Page(s):
2834 - 2837
ISSN :
1071-1023
Digital Object Identifier :
10.1116/1.1417545
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Nov 2001

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