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High-Q photonic crystal microcavities fabricated in a thin GaAs membrane

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6 Author(s)
Reese, C. ; Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106 ; Gayral, B. ; Gerardot, B.D. ; Imamoglu, A.
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We report on the fabrication of photonic crystal microcavities in GaAs having H1 and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process. © 2001 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:19 ,  Issue: 6 )