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A tool for pattern generation and microfabrication based on scanning micro/nanonozzle is presented. Electrically neutral radicals created in a plasma discharge are pumped through a small tube tapered to a nozzle. A small distance between the nozzle and the surface of the substrate allows a localized interaction. A description of the tool and principles of this technology, such as transport of free radicals through a high aspect ratio hollow tip, localized etching and high etching rates without ion bombardment are demonstrated in this work. This article presents the fundamental aspects and the experimental proofs of the outlined nanofabrication technique. © 2001 American Vacuum Society.