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Effect of the Ti-underlayer microstructure on the texture of Al thin films

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3 Author(s)
Yoo, Sehoon ; Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea ; Kim, Young-Ho ; Yoon, Chong Seung

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1362681 

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:19 ,  Issue: 3 )

Date of Publication:

May 2001

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