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Cantilever probes for spatio-temporal imaging of voltage pulses with an ultrafast scanning probe microscope

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3 Author(s)
Oesterschulze, E. ; Institute of Technical Physics, University of Kassel, Heinrich-Plett Strasse 40, 34109 Kassel, Germany ; Heisig, S. ; Steffens, W.M.

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We report on a novel cantilever probe for the investigation of ultrafast signals. High temporal resolution is achieved by integrating a photoconductive switch within a coplanar waveguide structure onto a low temperature GaAs coated GaAs cantilever. Experimental results and numerical calculations on the detection of picosecond electrical signals based on the optoelectronic technique of photoconductive sampling are presented. © 2001 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:19 ,  Issue: 1 )