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We report on a novel cantilever probe for the investigation of ultrafast signals. High temporal resolution is achieved by integrating a photoconductive switch within a coplanar waveguide structure onto a low temperature GaAs coated GaAs cantilever. Experimental results and numerical calculations on the detection of picosecond electrical signals based on the optoelectronic technique of photoconductive sampling are presented. © 2001 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:19 , Issue: 1 )
Date of Publication: Jan 2001