Cart (Loading....) | Create Account
Close category search window
 

Real-time composition control using spectral ellipsometry in growth of Hg1-xCdxTe by molecular beam epitaxy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Aqariden, F. ; DRS Infrared Technologies, L.P., P. O. Box 740188, Dallas, Texas 75374 ; Shih, H.D. ; Liao, P.-K. ; Duncan, W.M.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.591389 

Real-time composition control using spectral (or spectroscopic) ellipsometry (SE) in the growth of long-wavelength infrared (LWIR) Hg1-xCdxTe (x∼0.225) on Cd0.96Zn0.04Te(211) B by molecular beam epitaxy (MBE) was investigated. Excellent compositional reproducibility among the 10 LWIR Hg1-xCdxTe growth runs was demonstrated with the aid of SE, with the average composition being x=0.225 and the standard deviation in x being 0.000 42, the lowest figure that has ever been reported. The ability of MBE to switch from one composition to another on demand and with first pass success using SE is also demonstrated. © 2000 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 3 )

Date of Publication:

May 2000

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.