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A surface of the homoepitaxial diamond (001) thin film produced by microwave plasma chemical vapor deposition was observed by reflection high-energy electron diffraction (RHEED), contact atomic force microscopy (contact-AFM) and scanning tunneling microscopy (STM) on the same sample. It was checked by the RHEED observation that most areas of the sample surface had a 2×1 or 1×2 reconstructed structure, which indicates that most areas of the surface were covered with hydrogen termination. By contact-AFM a pseudoperfect surface with rare atomic-scale defects and steps was observed. By STM, on the other hand, a 2×1/1×2 double-domain structure was observed and the surface had many steps and defects. One should be careful because a contact-AFM image does not ensure true atomic-resolution since the multitip effect is dominant. © 2000 American Vacuum Society.