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SiC field emitter arrays fabricated by transfer mold technique

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3 Author(s)
Gorecka-Drzazga, A. ; Wrocław University of Technology, Institute of Microsystem Technology, 50-372 Wrocław, Poland ; Dziuban, J. ; Prociow, E.

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The field emission arrays of SiC sharp emitter tips have been produced for the first time by use of the transfer mold technique. The test structures of active gun, containing approximately 3×104 of emitters, were prepared. The field emission current and work function calculations for SiC emitter arrays have been presented. © 2000 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 2 )