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Mapping of wafer profile to plasma processing conditions: Forward and reverse maps

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4 Author(s)
Lane, Jennifer ; Bell Labs, Lucent Technologies, Murray Hill, New Jersey 07974 ; Rietman, Edward A. ; Layadi, Nace ; Lee, John T.C.

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Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 1 )