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Optical system for tunneling-electron luminescence spectro/microscopes with conductive-transparent tips in ultrahigh vacuums

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1 Author(s)
Murashita, Tooru ; NTT System Electronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-01, Japan

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A unique optical system has been developed for a tunneling-electron luminescence (TL) spectro/microscope with conductive-transparent (CT) tips operable and changeable in an ultrahigh vacuum (UHV). The optical system consists of two essential elements. The first element is fiber-optics, which effectively guides the luminescence from the CT tips to optical detectors without the need for optical alignment. The fiber-optics features (1) a mechanism to automatically reproduce optical coupling between the CT tip and the fiber every time the tip is changed, (2) a fiber set in a vacuum chamber to prevent steep fiber bending, and (3) a compact fiber-optic vacuum seal that maintains high transmittance and limits low gas leakage to ultimate pressures below 10-10 Torr. The second element is optical detection and processing, which reduce the influence of fluctuations in TL intensities, which is a serious problem in TL measurements. The main structures of this element are a whole spectral detector for spectroscopy and a tip-scan-synchronized photon counter for microscopy. The optical system was characterized through TL measurements on semiconductor nanostructures at low temperatures in an UHV. A TL spectro/microscope with the optical system achieved satisfactory performance. © 1999 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:17 ,  Issue: 1 )

Date of Publication:

Jan 1999

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