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Evaluation of total uncertainty in the dimension measurements using critical-dimension measurement scanning electron microscopes

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5 Author(s)
Mizuno, Fumio ; Instrument Division, Hitachi Ltd., Hitachinaka-shi, Ibaraki-ken 312-8504, Japan ; Shimizu, Minoru ; Sasada, Katsuhiro ; Mizuno, Takeshi
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Total uncertainty can be discussed in terms of bias and reproducibility. We have studied bias and reproducibility in the critical dimension measurement scanning electron microscope and measurements have derived expressions of them, and discussed the parameters which determine them by making a comparison with measurement data. © 1998 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 6 )