By Topic

Evaluation of total uncertainty in the dimension measurements using critical-dimension measurement scanning electron microscopes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
5 Author(s)
Mizuno, Fumio ; Instrument Division, Hitachi Ltd., Hitachinaka-shi, Ibaraki-ken 312-8504, Japan ; Shimizu, Minoru ; Sasada, Katsuhiro ; Mizuno, Takeshi
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link: 

Total uncertainty can be discussed in terms of bias and reproducibility. We have studied bias and reproducibility in the critical dimension measurement scanning electron microscope and measurements have derived expressions of them, and discussed the parameters which determine them by making a comparison with measurement data. © 1998 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 6 )