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Development of a stainless steel tube resistant to corrosive Cl2 gas for use in semiconductor manufacturing

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7 Author(s)
Ohmi, T. ; Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan ; Yoshida, M. ; Matudaira, Y. ; Shirai, Y.
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In order to develop a corrosion-free halogen gas delivery system for use in semiconductor manufacturing, Cr2O3 passivation of ferritic and austenitic stainless steels has been investigated. It has been shown that a Cr2O3 layer can be formed on an electropolished (EP) surface of ferritic 26Cr–1Mo stainless steel by oxidation above 600 °C, but excellent corrosion resistance performance to Cl2 gas can be obtained only by oxidation above 700 °C. On the other hand, on the EP surface of austenitic SUS 316L, a corrosion-resistant Cr2O3 layer is not formed by oxidation even up to 800 °C. © 1998 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 5 )