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Recent development in the application of a focused ion beam to preparation of thin foil specimens for transmission electron microscopy observation has been reviewed. It has been shown that this technique is very powerful for characterization of a variety of industrial materials. © 1998 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:16 , Issue: 4 )
Date of Publication: Jul 1998