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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:16 Issue:4 Help

Transmission electron microscopy observation of thin foil specimens prepared by means of a focused ion beam

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1 Author(s)
Saka, H. ; Department of Quantum Engineering, Nagoya University, Nagoya 464-8603, Japan

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.590202 

Recent development in the application of a focused ion beam to preparation of thin foil specimens for transmission electron microscopy observation has been reviewed. It has been shown that this technique is very powerful for characterization of a variety of industrial materials. © 1998 American Vacuum Society.  

Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 4 )

Date of Publication: Jul 1998

Page(s):
2522 - 2527
ISSN :
1071-1023
Digital Object Identifier :
10.1116/1.590202
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jul 1998

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