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Effect of N doping on the electron emission properties of diamondlike carbon film on a 2-in. Mo field emitter array panel

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6 Author(s)
Jae Hoon Jung ; Electronic Materials and Devices Research Center, KIST, Seoul 130-650, Korea ; Byeong Kwon Ju ; Kim, Hoon ; Oh, Myung Hwan
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We have studied the enhancement of field-emission characteristics by hydrogen-free nitrogen-doped diamondlike carbon (DLC) coating on Mo-tip field emitter arrays by a layer-by-layer technique using plasma-enhanced chemical vapor deposition. The Spindt-type molybdenum tip is used as an emission source without a resistive layer on the silicon substrate. The maximum emission current for each pixel was increased from 160 to 1520 μA by a 20 nm N-doped DLC coating. Furthermore, the emission current from DLC-coated field emitter arrays (FEAs) is more stable than that of noncoated FEAs. © 1998 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 2 )

Date of Publication:

Mar 1998

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