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Fabrication of thin-film cold cathodes by a modified chemical vapor deposition diamond process

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5 Author(s)
Weiss, B.L. ; Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802 ; Badzian, A. ; Pilione, L. ; Badzian, T.
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Thin-film cold cathodes have been grown on molybdenum by a modified microwave assisted plasma chemical vapor deposition diamond process. Electron field-emission tests have been performed on the devices. The modification from the chemical vapor deposition diamond process includes the addition of N2 and O2 into the plasma during the growth stage. Characterization of these films indicates a disordered tetrahedral carbon structure. Raman spectroscopy shows a disturbance in the cubic symmetry of the lattice and x-ray diffraction indicates a disordered tetrahedral structure. Electron emission testing indicate low turn-on voltages. Current densities from 1 to 8 mA/cm2 can be obtained for applied fields of 5–8 V/μm. The results are explained in terms of a change in the electronic band structure and the formation of states in the band gap. © 1998 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:16 ,  Issue: 2 )