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In nanopotentiometry a conductive atomic force microscope tip is used as a voltage probe in order to measure the distribution of the electrical potential on the cross section of an operating device. The information thus obtained is complementary to the carrier profiles and provides a method for calibration of device simulations. The experimental procedure is discussed in detail with emphasis on preparation techniques and contact force calibration. The present results are obtained on the cross section of a 0.25 μm complementary metal–oxide–semiconductor transistor cell which was designed such that even after sectioning, the device is still operational.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:16 , Issue: 1 )
Date of Publication: Jan 1998