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Investigation on a novel vacuum microelectronic pressure sensor with stepped field emission array

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6 Author(s)
Xia, S.H. ; Institute of Electronics, Academia Sinica, P.O. Box 2652, Beijing 100080, China ; Liu, J. ; Cui, D.F. ; Han, J.H.
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This article investigates a novel vacuum microelectronic pressure sensor in which the cathode emission array is distributed over a stepped cathode base instead of over a conventional flat cathode base. Our computer simulation results indicate that using the stepped field emission array gives the potential of increasing the sensor’s sensitivity and expanding its measurement range. Computer simulations are presented, and some experimental results are briefly reported. © 1997 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 4 )