Referenced Items are not available for this document.
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.589403
This article investigates a novel vacuum microelectronic pressure sensor in which the cathode emission array is distributed over a stepped cathode base instead of over a conventional flat cathode base. Our computer simulation results indicate that using the stepped field emission array gives the potential of increasing the sensor’s sensitivity and expanding its measurement range. Computer simulations are presented, and some experimental results are briefly reported. © 1997 American Vacuum Society.
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:15
,
Issue:
4
)
Date of Publication: Jul 1997
- Page(s):
- 1573 - 1576
- ISSN :
- 1071-1023
- Digital Object Identifier :
- 10.1116/1.589403
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Jul 1997
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
