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Quantification of topographic structure by scanning probe microscopy

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2 Author(s)
Kiely, James D. ; Department of Materials Science and Engineering, The University of Pennsylvania, Philadelphia, Pennsylvania 19104 ; Bonnell, Dawn A.

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Several mathematical approaches for quantifying the three-dimensional topographical structure from scanning probe microscopy images are evaluated. Variational, i.e., scale-dependent, roughness based on root-mean-square roughness, Fourier deconvolution, and the two-dimensional autocovariance function are compared for surfaces with widely varying character in order to develop criteria for accurate quantification. Thermally evaporated gold, a calibration grid, polycrystalline Si3N4, and silicon fracture surfaces serve as models for these techniques. The role of image artifacts on each approach is detailed. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 4 )

Date of Publication:

Jul 1997

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