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A new precision cross-sectional transmission electron microscopy (XTEM) sample preparation method was developed and is reported here. The major advantage of this method over a conventional sample prepared using a focused ion beam (FIB) microsection is that the sample sectioned with a FIB can be extracted directly from the matrix and transferred to a carbon supporting grid for TEM examination. With this technique, a XTEM sample can be prepared, totally eliminating the requirement for mechanical polishing. Samples can be made easily and quickly, thus enhancing both productivity and turnaround time. © 1997 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:15 , Issue: 3 )
Date of Publication: May 1997