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1 μm range comparative length measurement using a regular crystalline lattice and a dual tunneling unit scanning tunneling microscope

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5 Author(s)
Aketagawa, Masato ; Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-21, Japan ; Takada, Koji ; Suzuki, Seiki ; Sasaki, Shigetoshi
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This article presents a potential image processing method for determining the in-plane geometrical distortion of a scanning tunneling microscope (STM) image and calibrating it using a regular crystalline lattice, and describes the results obtained in comparative length measurements in the range of about 1 μm using a regular crystalline lattice as a reference scale and a dual tunneling unit-STM (DTU-STM) as a detector. The method is based on two-dimensional fast Fourier transform analysis. The DTU-STM with one X-Y stage and two tunneling units independently controlled in the Z-axis direction was utilized for comparative length measurement. To improve the measurement accuracy, the present method is used to process the raw images obtained from the DTU-STM. The results of experiments, in which the cleaved surface of highly oriented pyrolytic graphite is used as a reference scale for measurement of lengths on the order of 1 μm, demonstrate the feasibility of the present image processing method and the possibility of comparative length measurement with subnanometer resolution using the DTU-STM. © 1997 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 3 )