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Field emission of nitrogen doped diamondlike carbon films deposited by plasma enhanced chemical vapor deposition

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4 Author(s)
Park, Kyu Chang ; Department of Physics, Kyung Hee University, Dongdaemoon-ku, Seoul 130-701, Korea ; Moon, Jong Hyun ; Chung, Suk Jae ; Jin Jang

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The N doping effect on the electrical conductivity and electron emission property for diamondlike carbon (DLC) films deposited by plasma enhanced chemical vapor deposition (PECVD) has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer–Neldel relation: σ000exp(AEa) with A=19 eV-1 and σ00=9×10-8S/cm. The emission current for heavily N doped DLC films is much higher than that of undoped DLC even though the lightly N doped film shows much smaller current. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 2 )

Date of Publication:

Mar 1997

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