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Nanoscale colloidal particles: Monolayer organization and patterning

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3 Author(s)
Sato, T. ; Hitachi Cambridge Laboratory, Cavendish Laboratory, Madingley Road, Cambridge CB3 0HE, United Kingdom ; Hasko, D.G. ; Ahmed, H.

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The monolayer deposition of nanoscale colloidal particles (Au citrate sols) was demonstrated by employing an aminofunctional silane [3-(2-Aminoethlyamino) propyltrimethoxysilane] as a coupling agent. The compatibility of this colloidal Au deposition method with conventional electron beam lithography techniques was examined, and the two-dimensional patterning of the Au colloidal monolayer was demonstrated. Using this fabrication method, a proposal for a single electron device structure based on nanoscale (2 nm diameter) gold colloidal particles was made. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 1 )