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Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers

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5 Author(s)
Linnemann, R. ; Institute of Technical Physics, University of Kassel, Heinrich‐Plett‐Strasse 40, D‐34109 Kassel, Germany ; Gotszalk, T. ; Rangelow, I.W. ; Dumania, P.
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In this article a novel probe for atomic force microscopy will be introduced. It is based on a conventional micromachined silicon cantilever with an integrated electronic sensor which determines the cantilever deflection. The principle setup of this probe is described and a theoretical and an experimental investigation of the sensitivity of the probe will be presented. The probe is suitable for operation in the static as well as in the dynamic mode and was employed for imaging various materials. To enhance the sensitivity of the detection system and to obtain simultaneously a cantilever with a small spring constant, the geometry of the cantilever was modified. Finite element method calculations were performed to get the optimum sensor design. Furthermore, a different cantilever concept was designed to perform lateral force microscopy as well. © 1996 American Vacuum Society

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:14 ,  Issue: 2 )