By Topic

Poly-Silicon Based Latching RF MEMS Switch

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

A latching RF MEMS switch has been fabricated in a multi-user polysilicon surface micromachining process. The switch uses 5 V, 35 mA thermal actuation for < 500 mus to toggle between states and a compliant bistable latching mechanism to hold the state in the absence of applied bias. The switch, including probe pads, measures 1 mm2 and has <0.4 dB insertion loss, >25 dB return loss, and >75 dB isolation at 1 GHz. The switch has potential applications in low duty-cycle, low power RF tuning and switching applications.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:19 ,  Issue: 6 )