By Topic

Experimental study on the influence of liquid metal ion source energy distribution on focused ion beam induced deposition

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
4 Author(s)
Yasaka, A. ; Seiko Instruments Inc., 36‐1 Takenoshita, Oyama‐cho, Sunto‐gun, Shizuoka, Japan, 410‐13 ; Yamaoka, T. ; Kaito, T. ; Adachi, T.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

We investigated the halo around the carbon film deposited by a focused ion beam (FIB) for photomask repair. The halo size depends significantly on the operating condition of the liquid metal ion source (LMIS). The LMIS operation with high temperature and/or high emission current produces the large halo around the deposited film. It seems that the halo production is mainly due to the deposition by the broad tail of the FIB. We also measured the energy distributions of the ions emitted from the LMIS. According to our measurement, the tendency of the energy spread agrees qualitatively with the halo size.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:9 ,  Issue: 5 )