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Experimental study on the influence of liquid metal ion source energy distribution on focused ion beam induced deposition

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4 Author(s)
Yasaka, A. ; Seiko Instruments Inc., 36‐1 Takenoshita, Oyama‐cho, Sunto‐gun, Shizuoka, Japan, 410‐13 ; Yamaoka, T. ; Kaito, T. ; Adachi, T.

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We investigated the halo around the carbon film deposited by a focused ion beam (FIB) for photomask repair. The halo size depends significantly on the operating condition of the liquid metal ion source (LMIS). The LMIS operation with high temperature and/or high emission current produces the large halo around the deposited film. It seems that the halo production is mainly due to the deposition by the broad tail of the FIB. We also measured the energy distributions of the ions emitted from the LMIS. According to our measurement, the tendency of the energy spread agrees qualitatively with the halo size.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:9 ,  Issue: 5 )