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Atmospheric scanning electron microscopy using silicon nitride thin film windows

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2 Author(s)
Green, E.D. ; Ginzton Laboratory, Mail Code 4085 Stanford University, Stanford, California 94305 ; Kino, G.S.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.585422 

We report preliminary results of scanning electron microscopy (SEM) imaging with submicron resolution at atmospheric pressure using silicon nitride windows to separate the atmosphere from the electron optics. The edge response of the current system is 0.25 μm through 75 nm windows at 15 μm air path length. We discuss the merits of windowed atmospheric SEM systems.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:9 ,  Issue: 3 )

Date of Publication:

May 1991

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