Cart (Loading....) | Create Account
Close category search window
 

Characteristics of a helium field ion gun

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Konishi, Morikazu ; Research Department Semiconductor Products Group, Sony Corporation, 4‐14‐1, Asahi‐cho, Atsugi‐shi, Kanagawa‐ken 243, Japan ; Takizawa, Masaaki ; Tsumori, Toshiro

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.584051 

A helium field ion gun for a focused ion beam system was designed and constructed. The main feature of the ion gun structure is the use of a gas jet nozzle with a tungsten field emitter tip near the nozzle end. Since the helium gas jet is collimated towards the emitter tip, the local pressure in the vicinity of the tip is kept 110 times higher than the value for the location of the ion gauge which is about 20 cm away from the helium jet ion gun. Using this ion gun, current density of 1 μA/sr was obtained although the helium gas flow rate ejected from the nozzle is as small as 1.6×10-3 Torr l/s. This result indicates high efficiency of the helium gas supply to the emitter tip surface.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:6 ,  Issue: 1 )

Date of Publication:

Jan 1988

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.