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An EPROM cell with a magnesium electronic injector

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3 Author(s)
Kong, Sik On ; Dept. of Electr. & Electron. Eng., Auckland Univ., New Zealand ; Kwok, Chee Yee ; Sai Peng Wong

By using Mg as the tunnelling electrode for an EPROM cell, it is shown in a control experiment that the tunnelling current is much enhanced while the tunnelling field is much reduced after a sintering procedure in which Mg reacts with the SiO2 dielectric. Potentially, this may lead to faster programming, lower programming voltages and better programming endurance. An experimental EPROM cell has been made and has demonstrated programmability

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995