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In situ processing of high‐Tc YBaCuO superconducting devices by focused ion beam micromachining at low temperature

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12 Author(s)
Ben Assayag, G. ; Laboratoire de Microstructures et Microélectronique (L2M), 196 Avenue H. Ravera, F‐92225 Bagneux, France ; Gierak, J. ; Hamet, J.F. ; Prouteau, C.
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A focused ion beam (FIB) system coupled to a scanning electron microscope, including a new helium‐cooled stage and electrical feedthroughs, has been put into operation. It allows real‐time electron imaging during FIB machining while the sample is maintained at a minimum temperature of 25 K by continuous‐flow helium cooling. Simultaneously, electrical characteristics can be monitored, recorded, and stored. Experimental results on high‐critical‐temperature superconducting thin films are given, exhibiting the evolution of the device’s response during the FIB‐induced modifications. Two structures were realized at liquid‐nitrogen temperature: a low‐noise microbolometric sensor and a short‐channel superconducting quantum interference device‐like structure in YBaCuO material exhibiting a behavior of coherent vortex flow, micromachined by FIB. These experiments demonstrate the possibility of a precise in situ control of the critical current of micro‐ and nanobridges. © 1995 American Vacuum Society  

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:13 ,  Issue: 6 )

Date of Publication:

Nov 1995

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