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Two-stage fast focus method for mask registration

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2 Author(s)
M. G. He ; Dept. of Electr. Eng., R. Melbourne Inst. of Technol., Vic., Australia ; A. L. Harvey

For mask registration, we require matching between masks to be fast and reliable. By using coarse/fine search, the process can be speeded up but reach a point where the search speed is maximised while the process is still reliable. A two-stage probability based fast focus search strategy is proposed for mask matching in binary or grey scale images to further increase the search step while maintaining reliability of the process

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995