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Voltage-controlled micromechanical SOI optical waveguides

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3 Author(s)
Eng, T.T.H. ; Dept. of Phys., Hong Kong Univ. of Sci. & Tech., Clear Water Bay, Hong Kong ; Kan, Sidney C. ; Wong, George K.L.

We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 μm for the guided light is demonstrated with voltage-controlled electrostatic actuation

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995